Expertise and equipment

The photovoltaics department has cutting-edge technical equipment and machinery that allow us to conduct a wide range of R&D activities in the area of thin-film silicon photovoltaics:

• PECVD/PVD cluster tool (six chambers, 15 x 15 cm² area)
• Wet bench for cleaning and etching
• Laser structuring (ns, ps with galvoscanner)
• Scanning electron microscope (FIB and EDX) – Zeiss
• Raman spectroscopy
• FTIR
• Spectral ellipsometry
• Optical spectrometer with sphere
• Solar simulator – WACOM
• External quantum efficiency
• Constant photocurrent measurement
• Conductivity measurements (TCO, a-Si:H/µc-Si:H (n, p, i))
• AFM
• Profilometers
• Aging measuring station

Services provided:

• Process technology for silicon thin-film solar cells
• Developing new solar cell designs
• Layer deposition (silicon, alloys, TCOs, metals, SiO2)
• Laser structuring
• Measuring technology and examining characteristics
• Numerical simulations
• Process control strategies